Fabrication and mechanical testing of thin CYTOP membranes
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The fabrication and mechanical testing of thin CYTOP membranes is explored for implementation with surface plasmon waveguides. A membrane supported gold strip allows for the propagation of Long-Range Surface Plasmon Polaritons (LRSPPs) and functionality as a biochemical sensor. The fabrication of 25nm thick gold waveguides on thin (400nm) CYTOP membranes is described. Critical process steps include the CYTOP spin and curing procedure, metal lithography for forming the waveguides and wafer passivation during membrane release. Mechanical properties of the CYTOP membranes were experimentally determined through application of the bulge test. The extracted value for Young's Modulus was 1.4±0.2 GPa and residual film stress was 30.8±1.8 MPa. Narrow (200μm) membranes were observed to be able to withstand over 30kPa of differential pressure without failure.
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This work is available on request. You can request a copy at https://library.carleton.ca/forms/request-pdf-copy-thesis
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Copyright © 2009 the author(s). Theses may be used for non-commercial research, educational, or related academic purposes only. Such uses include personal study, research, scholarship, and teaching. Theses may only be shared by linking to Carleton University Institutional Repository and no part may be used without proper attribution to the author. No part may be used for commercial purposes directly or indirectly via a for-profit platform; no adaptation or derivative works are permitted without consent from the copyright owner.
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- 2009
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