Complementary metal oxide semiconductor compatible silicon-on-insulator optical rib waveguides with local oxidation of silicon isolation

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Creator: 

Rowe, Lynda

Date: 

2007

Subject: 

Silicon-on-insulator technology.
Optical wave guides.
Silicon oxide films.
Metal oxide semiconductors, Complementary.

Language: 

English

Publisher: 

Carleton University

Identifier: 

Proquest Record
Library Catalogue Record
https://doi.org/10.22215/etd/2007-08321

Thesis Degree Name: 

Master of Applied Science: 
M.App.Sc.

Thesis Degree Level: 

Master's

Thesis Degree Discipline: 

Engineering, Electrical

Parent Collection: 

Theses and Dissertations

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