Fabrication of a Micro-hotplate for Application as an Infrared Emitter

It appears your Web browser is not configured to display PDF files. Download adobe Acrobat or click here to download the PDF file.

Click here to download the PDF file.

Creator: 

Singh, Amrita

Date: 

2015

Abstract: 

The aim of this research is to design, fabricate and characterize a micro-hotplate which is suitable for application as an infrared source. For the heater material, Nichrome Ni-Cr (80/20) % an alloy of Ni (nickel) and Cr (chromium) is used. Nichrome exhibits high resistivity, low TCR and is resistant to natural processes of oxidation and corrosion; these qualities make nichrome a suitable material for a micro-hotplate. The heater resistance versus applied voltage is measured, where the slope of the curve is related to the TCR of the material. TCR measurements are carried out using a SPA with the sample on a temperature controlled chuck. NiCr thin film TCR is measured using a four-point probe technique from room temperature to 180℃. NiCr structures integrated on micro-hotplates are simultaneously heated and the corresponding resistance is measured using a source-meter that applies bias voltage and measures current. The MHP resistance is found to be stable after it has been passed through several conditioning steps.

Subject: 

Engineering - Electronics and Electrical

Language: 

English

Publisher: 

Carleton University

Thesis Degree Name: 

Master of Applied Science: 
M.App.Sc.

Thesis Degree Level: 

Master's

Thesis Degree Discipline: 

Engineering, Electrical and Computer

Parent Collection: 

Theses and Dissertations

Items in CURVE are protected by copyright, with all rights reserved, unless otherwise indicated. They are made available with permission from the author(s).