Fabrication of Long Range Surface Plasmon Polariton Biosensors Incorporating a Channel Etch Stop Layer and Wafer Bonded Cover
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This thesis presents the micro-fabrication process of a Long Range Surface Plasmon Polariton (LRSPP) biosensor device. The fabrication process was modified in two aspects which include adding a channel etch stop layer to improve the accuracy and uniformity of channels in the device and replacing the photoresist etching mask by an Al etching mask to avoid the thermal cracking. The optical performance of the fabricated chips shows that the biosensor has a 5.03dB/mm attenuation loss and has a 0.10dB response for a monolayer of BSA on Au waveguides. CYTOP bonding process was introduced in the fabrication of the device that incorporates a glass cover. A glass wafer was successfully bonded to a silicon wafer by CYTOP bonding process to seal the channels, which ensured an isolated testing environment for the biochemical fluid.
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Copyright © 2018 the author(s). Theses may be used for non-commercial research, educational, or related academic purposes only. Such uses include personal study, research, scholarship, and teaching. Theses may only be shared by linking to Carleton University Institutional Repository and no part may be used without proper attribution to the author. No part may be used for commercial purposes directly or indirectly via a for-profit platform; no adaptation or derivative works are permitted without consent from the copyright owner.
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