Creator:
Salahuddin, Mohammad
Date:
1998
Subject:
Integrated Circuits -- Very Large Scale Integration -- Computer Simulation
Metallizing
Tungsten
Sputtering (Physics)
Refractory Materials
Language:
English
Publisher:
Carleton University
Identifier:
Thesis Degree Name:
Master of Engineering:
M.Eng.
Thesis Degree Level:
Master's
Thesis Degree Discipline:
Engineering, Electrical
Parent Collection:
Theses and Dissertations