Characterization of piezoelectric AlN thin films deposited on Si by RF reactive magnetron sputtering at low temperature for acoustic wave devices

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Creator: 

Mirfazli, Akhtar

Date: 

2004

Language: 

English

Publisher: 

Carleton University

Thesis Degree Name: 

Master of Applied Science: 
M.App.Sc.

Thesis Degree Level: 

Master's

Thesis Degree Discipline: 

Engineering, Electrical

Parent Collection: 

Theses and Dissertations

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