Line segment simulation of sputtered thin film growth over VLSI topography.

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Creator: 

Mo'allim, Abdisalam Sheikh-Omar

Date: 

1998

Subject: 

Integrated Circuits -- Very Large Scale Integration -- Design And Construction
Integrated Circuits -- Design And Construction -- Simulation Methods
Monte Carlo Method -- Computer Simulation
Thin Films
Sputtering (Physics)
Metallizing
Microelectronics

Language: 

English

Publisher: 

Carleton University

Identifier: 

Proquest Record
Library Catalogue Record
https://doi.org/10.22215/etd/1998-04030

Thesis Degree Name: 

Master of Engineering: 
M.Eng.

Thesis Degree Level: 

Master's

Thesis Degree Discipline: 

Engineering, Electrical

Parent Collection: 

Theses and Dissertations

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