Creator:
- Poyhonen, P.
- Honkanen, S.
- Tervonen, A.
- Tahkokorpi, M.
- Albert, Jacques
Date:
1991-07-18
Abstract:
Fabrication of singlemode glass waveguide devices by silver film ion exchange with standard photoresist as a mask for the ion exchange is proposed. The process uses the advantages of the silver film ion exchange and the simple and accurate patterning when photoresist is used directly as a mask. As a component example, a singlemode 1/8 power splitter is fabricated and measured.
Publisher:
Electronics Letters
Identifier:
Peer Review:
Published in Peer Reviewed Journal
Faculty Name:
Faculty of Engineering and Design
Department Name:
Department of Electronics