Planar 1/8 splitter in glass by photoresist masked silver film ion exchange

Creator: 

  • Poyhonen, P.
  • Honkanen, S.
  • Tervonen, A.
  • Tahkokorpi, M.
  • Albert, Jacques

Date: 

1991-07-18

Abstract: 

Fabrication of singlemode glass waveguide devices by silver film ion exchange with standard photoresist as a mask for the ion exchange is proposed. The process uses the advantages of the silver film ion exchange and the simple and accurate patterning when photoresist is used directly as a mask. As a component example, a singlemode 1/8 power splitter is fabricated and measured.

Publisher: 

Electronics Letters

Peer Review: 

Published in Peer Reviewed Journal

Faculty Name: 

Faculty of Engineering and Design

Department Name: 

Department of Electronics

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