Design, synthesis and thermal analysis of group 11 and 13 ALD precursors

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Creator: 

Kenney, Amanda

Date: 

2007

Subject: 

Inorganic compounds -- Synthesis.
Thin films.
Microelectronics -- Materials.
Aluminum.
Gallium.
Ligands.
Carbodiimides.
Chemistry, Inorganic.

Language: 

English

Publisher: 

Carleton University

Identifier: 

Proquest Record
Library Catalogue Record
https://doi.org/10.22215/etd/2007-07679

Thesis Degree Name: 

Master of Arts: 
M.A.

Thesis Degree Level: 

Master's

Thesis Degree Discipline: 

Chemistry

Parent Collection: 

Theses and Dissertations

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